The design and optimisation of a delta doped Schottky diode is reported in this paper. The thickness of each layer, area and the spacing between the Schottky contact and the ohmic contact are optimised using Silvaco™ to give the maximum change in capacitance and the lowest series resistance. A lumped equivalent circuit for the diode is described with an explanation of lumped parameter extraction after the fabrication process. This type of diode will be used for the design of nonlinear transmission lines (NLTLs) for pulse compression applications